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Lead Zirconate Titanate (PZT) with its high piezo-electricity and electromechanical coupling coefficient (in bulk) promises to be an efficient transducer for electro-optomechanical applications. Since the development of a deposition method for thin films of PZT on Si-photonic chips using a transparent buffer layer, our focus has been to explore the various properties of this material for integrated photonic applications. In this work, we investigate the piezo-electric response of this PZT film by exciting surface acoustic waves (SAWs) with interdigitated transducers (IDTs). Furthermore, we demonstrate the optical phase modulation from the SAW on a PZT integrated waveguide circuit.
Piezoelectric characterization of Si-photonic integrated PZT film
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Irfan Ansari